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T. Smy (Tom)

2001

Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator

Publication

Publication

Journal of Vacuum Science and Technology A , Volume 19 - Issue 1 p. 251- 261

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Persistent URL doi.org/10.1116/1.1329124
Journal Journal of Vacuum Science and Technology A
Organisation Department of Electronics
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Smy, T. (2001). Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator. Journal of Vacuum Science and Technology A, 19(1), 251–261. doi:10.1116/1.1329124
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