2001
Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator
Publication
Publication
Journal of Vacuum Science and Technology A , Volume 19 - Issue 1 p. 251- 261
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dx.doi.org/10.1116/1.1329124 | |
Journal of Vacuum Science and Technology A | |
Organisation | Department of Electronics |
Smy, T. (2001). Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator. Journal of Vacuum Science and Technology A, 19(1), 251–261. doi:10.1116/1.1329124
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