Additional Metadata
Persistent URL dx.doi.org/10.1116/1.1329124
Journal Journal of Vacuum Science and Technology A
Citation
Smy, T. (2001). Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator. Journal of Vacuum Science and Technology A, 19(1), 251–261. doi:10.1116/1.1329124