Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector

Devries, A.M., N.G. Tarr (Gary), Cheben, P., Grant, P.D., Janz, S. and Xu, D.-X.

2002-05-01

Journal of Vacuum Science and Technology A , Volume 20 - Issue 3 p. 1079- 1081

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Persistent URL	dx.doi.org/10.1116/1.1475981
Journal	Journal of Vacuum Science and Technology A
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Devries, A.M., Tarr, N.G, Cheben, P., Grant, P.D., Janz, S., & Xu, D.-X. (2002). Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector. Journal of Vacuum Science and Technology A, 20(3), 1079–1081. doi:10.1116/1.1475981

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