Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector

Devries, A.M., N.G. Tarr (Gary), Cheben, P., Grant, P.D., Janz, S. and Xu, D.-X.

2002-05-01

Additional Metadata
Persistent URL	dx.doi.org/10.1116/1.1475981
Journal	Journal of Vacuum Science and Technology A
Organisation	Department of Electronics
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Devries, A.M., Tarr, N.G, Cheben, P., Grant, P.D., Janz, S., & Xu, D.-X. (2002). Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector. Journal of Vacuum Science and Technology A, 20(3), 1079–1081. doi:10.1116/1.1475981

Publication