2002-05-01
Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector
Publication
Publication
Journal of Vacuum Science and Technology A , Volume 20 - Issue 3 p. 1079- 1081
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dx.doi.org/10.1116/1.1475981 | |
Journal of Vacuum Science and Technology A | |
Organisation | Department of Electronics |
Devries, A.M., Tarr, N.G, Cheben, P., Grant, P.D., Janz, S., & Xu, D.-X. (2002). Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector. Journal of Vacuum Science and Technology A, 20(3), 1079–1081. doi:10.1116/1.1475981
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