Additional Metadata
Persistent URL dx.doi.org/10.1116/1.1475981
Journal Journal of Vacuum Science and Technology A
Citation
Devries, A.M., Tarr, N.G, Cheben, P., Grant, P.D., Janz, S., & Xu, D.-X. (2002). Submicron, high speed complementary metal-oxide semiconductor compatible metal-semiconductor-metal photodetector. Journal of Vacuum Science and Technology A, 20(3), 1079–1081. doi:10.1116/1.1475981