Athermal silicon subwavelength grating waveguides are demonstrated. We report the results of numerical simulations and experiments for the waveguide thermo-optic coefficients, as well as fabrication tolerances and the thermal bandwidth.

athermal, grating, photonics, silicon, subwavelength, thermo-optic, waveguide
8th IEEE International Conference on Group IV Photonics, GFP 2011
Department of Electronics

Ibrahim, M. (Marc), Schmid, J.H. (Jens H.), Cheben, P. (Pavel), Lapointe, J. (Jean), Janz, S. (Siegfried), Bock, P.J. (Przemek J.), … Ye, W.N. (2011). Athermal silicon subwavelength grating waveguides. In IEEE International Conference on Group IV Photonics GFP (pp. 258–260). doi:10.1109/GROUP4.2011.6053782