We present a method for designing temperature independent silicon waveguide devices using the subwavelength grating effect. Photonic wire waveguides are patterned with periodic gaps and filled with SU-8 polymer to cancel the silicon thermo-optic effect.

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Conference Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2011
Schmid, J.H. (J. H.), Ibrahim, M. (M.), Cheben, P. (P.), Lapointe, J. (J.), Janz, S. (S.), Densmore, P.J.B.A. (P.J. Bock A.), … Xu, D.-X. (D. X.). (2011). Athermal silicon waveguides using the subwavelength grating effect. In Optics InfoBase Conference Papers.