We present a method for designing temperature independent silicon waveguide devices using the subwavelength grating effect. Photonic wire waveguides are patterned with periodic gaps and filled with SU-8 polymer to cancel the silicon thermo-optic effect.

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Conference Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2011
Citation
Schmid, J.H. (J. H.), Ibrahim, M. (M.), Cheben, P. (P.), Lapointe, J. (J.), Janz, S. (S.), Densmore, P.J.B.A. (P.J. Bock A.), … Xu, D.-X. (D. X.). (2011). Athermal silicon waveguides using the subwavelength grating effect. In Optics InfoBase Conference Papers.