Fabrication of high aspect ratio optical light pipes
Presented at the Frontiers in Optics, FiO 2009 (October 2009), San Jose, CA
We report fabrication techniques for high aspect ratio vertical light pipes in a 10μm thick SiO2 layer. Light pipes with an aspect ratio of 2.8:1 and a sidewall angle of 89.5o were demonstrated.
|Conference||Frontiers in Optics, FiO 2009|
Ye, W.N, Duane, P. (Peter), Wober, M. (Munib), & Crozier, K.B. (Kenneth B.). (2009). Fabrication of high aspect ratio optical light pipes. In Optics InfoBase Conference Papers.