We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.

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doi.org/10.1117/12.860777
Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
Department of Electronics

Tut, T. (Turgut), Duane, P. (Peter), Ye, W.N, Wober, M. (Munib), & Crozier, K.B. (Kenneth B.). (2010). Silicon nitride light pipes for image sensors. In Proceedings of SPIE - The International Society for Optical Engineering. doi:10.1117/12.860777