Silicon nitride light pipes for image sensors

Tut, Turgut; Duane, Peter; Ye, Winnie N.; Wober, Munib; Crozier, Kenneth B.

doi:10.1117/12.860777

Tut, T. (Turgut), Duane, P. (Peter), W.N. Ye (Winnie N.), Wober, M. (Munib) and Crozier, K.B. (Kenneth B.)

2010-10-25

Silicon nitride light pipes for image sensors

Presented at the Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon (August 2010), San Diego, CA

We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.

Additional Metadata
Keywords	CMOS, Collection efficiency, Image sensors, Light-pipe, Micro-masking, Photodetectors, Pillars, Si, Silicon nitride, SiO2, Waveguide
Persistent URL	doi.org/10.1117/12.860777
Conference	Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
Organisation	Department of Electronics
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Tut, T. (Turgut), Duane, P. (Peter), Ye, W.N, Wober, M. (Munib), & Crozier, K.B. (Kenneth B.). (2010). Silicon nitride light pipes for image sensors. In Proceedings of SPIE - The International Society for Optical Engineering. doi:10.1117/12.860777

Silicon nitride light pipes for image sensors

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