We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.

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Keywords CMOS, Collection efficiency, Image sensors, Light-pipe, Micro-masking, Photodetectors, Pillars, Si, Silicon nitride, SiO2, Waveguide
Persistent URL dx.doi.org/10.1117/12.860777
Conference Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
Tut, T. (Turgut), Duane, P. (Peter), Ye, W.N, Wober, M. (Munib), & Crozier, K.B. (Kenneth B.). (2010). Silicon nitride light pipes for image sensors. In Proceedings of SPIE - The International Society for Optical Engineering. doi:10.1117/12.860777