2010-10-25
Silicon nitride light pipes for image sensors
Publication
Publication
Presented at the
Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon (August 2010), San Diego, CA
We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.
| Additional Metadata | |
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| Keywords | CMOS, Collection efficiency, Image sensors, Light-pipe, Micro-masking, Photodetectors, Pillars, Si, Silicon nitride, SiO2, Waveguide |
| Persistent URL | dx.doi.org/10.1117/12.860777 |
| Conference | Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon |
| Citation |
Tut, T. (Turgut), Duane, P. (Peter), Ye, W.N, Wober, M. (Munib), & Crozier, K.B. (Kenneth B.). (2010). Silicon nitride light pipes for image sensors. In Proceedings of SPIE - The International Society for Optical Engineering. doi:10.1117/12.860777
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