2003-12-01
O+-ion implantation for practical InP-based digital optical switches
Publication
Publication
Presented at the
2003 International Electronic Packaging Technical Conference and Exhibition (July 2003)
The fabrication of Digital Optical Switches with O+-ion implanted - electrical isolated - branches is described. Multiple-vs. single- implantation schemes and their effect on sheet resistance is compared using TLM and SIMS measurements.
| Additional Metadata | |
|---|---|
| Keywords | Carrier injection, Digital optical switch, Implantation, InGaAsP, InP |
| Conference | 2003 International Electronic Packaging Technical Conference and Exhibition |
| Citation |
Barrios, P. (Pedro), Janz, S. (Siegfried), Golub, I. (Ilya), Poole, P. (Philip), Chow-Chong, P. (Phillip), Poitras, D. (Daniel), … Abdalla, S. (Shawkat). (2003). O+-ion implantation for practical InP-based digital optical switches. Presented at the 2003 International Electronic Packaging Technical Conference and Exhibition.
|