O+-ion implantation for practical InP-based digital optical switches

Barrios, Pedro; Janz, Siegfried; Golub, Ilya; Poole, Philip; Chow-Chong, Phillip; Poitras, Daniel; Sproule, Irwin; Malloy, Mark; Delâge, André; Mckinnon, Ross; Syrett, Barry; El-Mougy, Shawky; Abdalla, Shawkat

Barrios, P. (Pedro), Janz, S. (Siegfried), Golub, I. (Ilya), Poole, P. (Philip), Chow-Chong, P. (Phillip), Poitras, D. (Daniel), Sproule, I. (Irwin), Malloy, M. (Mark), Delâge, A. (André), Mckinnon, R. (Ross), et al. Abdalla, S. (Shawkat)

2003-12-01

O+-ion implantation for practical InP-based digital optical switches

Presented at the 2003 International Electronic Packaging Technical Conference and Exhibition (July 2003)

The fabrication of Digital Optical Switches with O+-ion implanted - electrical isolated - branches is described. Multiple-vs. single- implantation schemes and their effect on sheet resistance is compared using TLM and SIMS measurements.

Additional Metadata
Keywords	Carrier injection, Digital optical switch, Implantation, InGaAsP, InP
Conference	2003 International Electronic Packaging Technical Conference and Exhibition
Organisation	Department of Electronics
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Barrios, P. (Pedro), Janz, S. (Siegfried), Golub, I. (Ilya), Poole, P. (Philip), Chow-Chong, P. (Phillip), Poitras, D. (Daniel), … Abdalla, S. (Shawkat). (2003). O+-ion implantation for practical InP-based digital optical switches. Presented at the 2003 International Electronic Packaging Technical Conference and Exhibition.

O+-ion implantation for practical InP-based digital optical switches

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O+-ion implantation for practical InP-based digital optical switches

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