The fabrication of Digital Optical Switches with O+-ion implanted - electrical isolated - branches is described. Multiple-vs. single- implantation schemes and their effect on sheet resistance is compared using TLM and SIMS measurements.

Carrier injection, Digital optical switch, Implantation, InGaAsP, InP
2003 International Electronic Packaging Technical Conference and Exhibition
Department of Electronics

Barrios, P. (Pedro), Janz, S. (Siegfried), Golub, I. (Ilya), Poole, P. (Philip), Chow-Chong, P. (Phillip), Poitras, D. (Daniel), … Abdalla, S. (Shawkat). (2003). O+-ion implantation for practical InP-based digital optical switches. Presented at the 2003 International Electronic Packaging Technical Conference and Exhibition.