2015
Test pixels for high-temperature infrared scene projection
Publication
Publication
Presented at the
Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XXVI (April 2015), Baltimore
High pixel temperatures for IR scene projector arrays face materials challenges of oxidation, diffusion, and recrystallization. For cost effective development of new high-temperature materials, we have designed and fabricated simplified pixels for testing. These consist of resistive elements, traces, and bond pads sandwiched between dielectric layers on Si wafers. Processing involves a pad exposure etch, a pixel outline etch, and an undercut etch to thermally isolate the resistive element from the substrate. Test pixels were successfully fabricated by electron-beam lithography using a combination of wet and dry etching.
| Additional Metadata | |
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| Keywords | Infrared, MEMS, Scene projector |
| Persistent URL | dx.doi.org/10.1117/12.2177025 |
| Conference | Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XXVI |
| Citation |
Fredricksen, C.J. (Christopher J.), Calhoun, S. (Seth), Trewick, S. (Stephen), Coffey, A. (Aubrey), Dein, E. (Edward), Coffey, K.R. (Kevin R.), … Goodwin, S.H. (Scott H.). (2015). Test pixels for high-temperature infrared scene projection. In Proceedings of SPIE - The International Society for Optical Engineering. doi:10.1117/12.2177025
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