Coplanar waveguide (CPW) structures provide an effective way to implement passive components in silicon microwave ICs. Use of silver will reduce the loss in CPWs metallization to the lowest possible level, which is vital to minimize noise. Electromigration, electrochemical migration and agglomeration are not expected to be a problem in silver microwave passives due to the coarse dimensions and low operating current densities encountered in CPWs. In this study Ag and Cu coplanar waveguides on quartz substrate were designed, fabricated and tested. We report silver CPWs showing a 2 to 3 Ω/cm improvement in line resistance over copper devices of identical geometry at 20 GHz.

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Conference Advanced Metallization Conference 2004, AMC 2004
Citation
Levenets, V.V. (Vladislav V.), Amaya, R, Garry Tarr, N., Smy, T, & Rogers, J. (2004). Characterization of silver coplanar waveguides for applications in Si MMIC. Presented at the Advanced Metallization Conference 2004, AMC 2004.