We explore the monolithic integration of conventional electronics with SOI photonics using the commercial silicon photonics foundry technology offered by A*STAR's Institute of Microelectronics (IME). This process offers optical waveguide modulators and photodetectors, but was not intended to support transistors. We present the implementation of junction field effect transistors (JFETs) integrated with optical waveguides and photodetectors. A simple SPICE model is developed for the JFETs based on the available ion implant parameters, and the geometry feature size allowed by the technology's layout rules. We have demonstrated the monolithic integration of photonics and electronics circuits. This work could be useful for application in waveguide sensors and optical telecommunications.

Additional Metadata
Keywords Junction field-effect transistor (JFET), Optoelectronics integration, Silicon photonics
Persistent URL dx.doi.org/10.3390/app9193964
Journal Applied Sciences
Citation
Li, S. (Shuxia), Tarr, N.G, & Ye, W.N. (2019). JFET integration using a foundry SOI photonics platform. Applied Sciences, 9(19). doi:10.3390/app9193964