Planar 1/8 splitter in glass by photoresist masked silver film ion exchange
Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.
Poyhonen, P., Honkanen, S., Tervonen, A., Tahkokorpi, M., & Albert, J. (1991). Planar 1/8 splitter in glass by photoresist masked silver film ion exchange. Electronics Letters. doi:10.1049/el:19910829