2005-12-01
Optical actuation of MEMS micro-gears through radiation pressure
Publication
Publication
Presented at the
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (August 2005)
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dx.doi.org/10.1109/OMEMS.2005.1540076 | |
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications | |
Organisation | Department of Electronics |
Gauthier, R, & Tait, R. (2005). Optical actuation of MEMS micro-gears through radiation pressure. Presented at the IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. doi:10.1109/OMEMS.2005.1540076
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