doi.org/10.1109/OMEMS.2005.1540076
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Department of Electronics

Gauthier, R, & Tait, R. (2005). Optical actuation of MEMS micro-gears through radiation pressure. Presented at the IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. doi:10.1109/OMEMS.2005.1540076