Integrated ultrasonic shear wave probes have been designed and developed using a mode conversion theory for nondestructive testing and characterization at elevated temperatures. The probes consisted of metallic substrates and high temperature piezoelectric thick (>40 μm) films through a paint-on method. Shear waves are generated due to mode conversion from longitudinal to shear waves because of reflection inside the substrate having a specific shape. A novel design scheme is proposed to reduce the machining time of substrates and thick film fabrication difficulty. A probe simultaneously generating and receiving both longitudinal and shear waves is also developed and demonstrated. In addition, a shear wave probe using a clad buffer rod consisting of an aluminum core and stainless steel cladding has been developed. All the probes were tested and successfully operated at 150 °C.