CMOS, LOCOS, Loss, Rib waveguide, SOI
dx.doi.org/10.1117/12.714641
Silicon Photonics II
Department of Electronics

Rowe, L.K. (Lynda K.), Elsey, M. (Michael), Post, E. (Edith), Tarr, N.G, & Knights, A.P. (Andrew P.). (2007). A CMOS-compatible rib waveguide with Local Oxidation of Silicon isolation. Presented at the Silicon Photonics II. doi:10.1117/12.714641