2008-03-31
SOI waveguide fabrication process development using star coupler scattering loss measurements
Publication
Publication
Presented at the
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (December 2007)
| Additional Metadata | |
|---|---|
| Keywords | Fabrication process, Resist footings, Scattering loss, Sidewall roughness, Silicon-on-insulator, Star coupler |
| Persistent URL | dx.doi.org/10.1117/12.758968 |
| Conference | Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV |
| Citation |
Yap, K.P., Lapointe, J., Lamontagne, B., Delâge, A., Bogdanov, A., Janz, S., & Syrett, B. (2008). SOI waveguide fabrication process development using star coupler scattering loss measurements. Presented at the Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. doi:10.1117/12.758968
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