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doi.org/10.1117/12.758968
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Carleton University

Yap, K.P., Lapointe, J., Lamontagne, B., Delâge, A., Bogdanov, A., Janz, S., & Syrett, B. (2008). SOI waveguide fabrication process development using star coupler scattering loss measurements. Presented at the Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. doi:10.1117/12.758968