Additional Metadata
Keywords Fabrication process, Resist footings, Scattering loss, Sidewall roughness, Silicon-on-insulator, Star coupler
Persistent URL dx.doi.org/10.1117/12.758968
Conference Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Citation
Yap, K.P., Lapointe, J., Lamontagne, B., Delâge, A., Bogdanov, A., Janz, S., & Syrett, B. (2008). SOI waveguide fabrication process development using star coupler scattering loss measurements. Presented at the Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. doi:10.1117/12.758968