2008-03-31
SOI waveguide fabrication process development using star coupler scattering loss measurements
Publication
Publication
Presented at the
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (December 2007)
Additional Metadata | |
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Fabrication process, Resist footings, Scattering loss, Sidewall roughness, Silicon-on-insulator, Star coupler | |
dx.doi.org/10.1117/12.758968 | |
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV | |
Organisation | Carleton University |
Yap, K.P., Lapointe, J., Lamontagne, B., Delâge, A., Bogdanov, A., Janz, S., & Syrett, B. (2008). SOI waveguide fabrication process development using star coupler scattering loss measurements. Presented at the Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. doi:10.1117/12.758968
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