Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)

Gardes, F.Y., Reed, G.T., Knights, A.P., Mashanovich, G., Jessop, P.E., Rowe, L., McFaul, S., Bruce, D. and N.G. Tarr (Gary)

2008-04-21

Presented at the Silicon Photonics III (January 2008)

Additional Metadata
Keywords	LOCOS, Rib waveguides, Silicon photonics, Silicon-on-insulator (SOI), Single-mode condition
Persistent URL	dx.doi.org/10.1117/12.765383
Conference	Silicon Photonics III
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Gardes, F.Y., Reed, G.T., Knights, A.P., Mashanovich, G., Jessop, P.E., Rowe, L., … Tarr, N.G. (2008). Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS). Presented at the Silicon Photonics III. doi:10.1117/12.765383

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