2008-04-21
Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)
Publication
Publication
Presented at the
Silicon Photonics III (January 2008)
Additional Metadata | |
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LOCOS, Rib waveguides, Silicon photonics, Silicon-on-insulator (SOI), Single-mode condition | |
dx.doi.org/10.1117/12.765383 | |
Silicon Photonics III | |
Organisation | Department of Electronics |
Gardes, F.Y., Reed, G.T., Knights, A.P., Mashanovich, G., Jessop, P.E., Rowe, L., … Tarr, N.G. (2008). Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS). Presented at the Silicon Photonics III. doi:10.1117/12.765383
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