Additional Metadata
Keywords LOCOS, Rib waveguides, Silicon photonics, Silicon-on-insulator (SOI), Single-mode condition
Persistent URL dx.doi.org/10.1117/12.765383
Conference Silicon Photonics III
Citation
Gardes, F.Y., Reed, G.T., Knights, A.P., Mashanovich, G., Jessop, P.E., Rowe, L., … Tarr, N.G. (2008). Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS). Presented at the Silicon Photonics III. doi:10.1117/12.765383