Additional Metadata
Keywords Defect engineering, Divacancy, LOCOS, Photodetector, Photonics, Responsivity, Silicon, SOI, Waveguide
Persistent URL dx.doi.org/10.1117/12.790960
Conference Silicon Photonics III
Citation
Logan, D., Knights, A.P., Jessop, P.E., & Tarr, N.G. (2008). Design of integrated LOCOS waveguide photodetector on SOI. Presented at the Silicon Photonics III. doi:10.1117/12.790960