Biomedical micro-electromechanical systems (bioMEMS) and other biochips usually have exposed chip surfaces that interface with fluids containing biological elements. These chips require post- processing for fluidic encapsulation to confine the spreading of fluids during experiments. An effective fluidic encapsulation protocol is re- ported here that simplifies this encapsulation procedure. The protocol uses tools and components found in a typical fabrication laboratory setting. The procedure encapsulates each edge of the chip working area in one cycle and achieves sharply defined edges with thickness of 1 to 5 mm with boundary tolerance less than 1 mm. The protocol reduces time, complexity, cost and defects for biochip encapsulation with a working area having lengths between 3 to 100 mm.

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Keywords Biomems, Fluidic encapsulation, Microfluidics, Polyimide
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Journal IEICE Electronics Express
Morshed, B.I. (Bashir I.), Shams, M, & Mussivand, T. (Tofy). (2011). A simple and effective fluidic encapsulation protocol for biomems devices. IEICE Electronics Express, 8(19), 1549–1555. doi:10.1587/elex.8.1549