The LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process.

Additional Metadata
Keywords LOCOS, photonic wire, SOI waveguides
Persistent URL dx.doi.org/10.1109/GROUP4.2011.6053779
Conference 8th IEEE International Conference on Group IV Photonics, GFP 2011
Citation
Tam, A.W. (Andrew W.), Ibrahim, M. (Marc), Lamontagne, B. (Boris), Tarr, N.G, Ye, W.N, Janz, S. (Siegfried), & Xu, D. (Danxia). (2011). Deep submicron LOCOS-defined SOI photonic wire waveguides. Presented at the 8th IEEE International Conference on Group IV Photonics, GFP 2011. doi:10.1109/GROUP4.2011.6053779